首页   按字顺浏览 期刊浏览 卷期浏览 Infrared diode laser diagnostics of methane plasmas produced in a deposition reactor
Infrared diode laser diagnostics of methane plasmas produced in a deposition reactor

 

作者: P. B. Davies,   P. M. Martineau,  

 

期刊: Applied Physics Letters  （AIP Available online 1990）
卷期: Volume 57, issue 3  

页码: 237-239

 

ISSN:0003-6951

 

年代: 1990

 

DOI:10.1063/1.103727

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Tunable infrared diode laser spectroscopy has been applied to the study of CH4plasmas generated in a deposition reactor run at 20 kHz. Absolute number densities of CH4, C2H4, and CH3have been measured as functions of pressure and current. A qualitative explanation of the results is presented.

 

点击下载:  PDF (293KB)



返 回