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Azide-Containing Phenolic Resin as a Negative Deep Uv Resist

 

作者: Saburo Nonogaki,   Minoru Toriumi,  

 

期刊: Journal of Macromolecular Science: Part A - Chemistry  (Taylor Available online 1988)
卷期: Volume 25, issue 5-7  

页码: 617-626

 

ISSN:0022-233X

 

年代: 1988

 

DOI:10.1080/00222338808053388

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

A negative photoresist has been developed by partial esterification of poly(p-hydroxystyrene) withp-azidobenzenesulfonyl chloride. About 10% of esterification is sufficient to sensitize the polymer to light in the wavelength region between 240 and 300 nm. The dose required to insolubilize the polymer was 80 mJ/cm2. The resolution capability is not as high as expected because of the swelling of photoinsolubilized resist films in an aqueous alkaline developer.

 

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