Azide-Containing Phenolic Resin as a Negative Deep Uv Resist
作者:
Saburo Nonogaki,
Minoru Toriumi,
期刊:
Journal of Macromolecular Science: Part A - Chemistry
(Taylor Available online 1988)
卷期:
Volume 25,
issue 5-7
页码: 617-626
ISSN:0022-233X
年代: 1988
DOI:10.1080/00222338808053388
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
A negative photoresist has been developed by partial esterification of poly(p-hydroxystyrene) withp-azidobenzenesulfonyl chloride. About 10% of esterification is sufficient to sensitize the polymer to light in the wavelength region between 240 and 300 nm. The dose required to insolubilize the polymer was 80 mJ/cm2. The resolution capability is not as high as expected because of the swelling of photoinsolubilized resist films in an aqueous alkaline developer.
点击下载:
PDF (416KB)
返 回