The development of W-band klystrons is discussed. Modeling of the klystron performance predicts 100 kW output power from a single klystron. The permanent magnet focusing and small size of the circuit permit combination of multiple klystrons in a module. A six-klystron module in a single vacuum envelope is expected to produce 500 kW peak power and up to 5 kW average power. The critical issues in the W-band klystron development are the electron beam transport and the fabrication of the klystron circuit. Two microfabrication techniques, EDM and LIGA, are being evaluated to produce the W-band circuit. ©1999 American Institute of Physics.