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A new system for on‐line x‐ray topography

 

作者: N. I. Komyak,   V. G. Lutsau,   V. P. Efanov,   S. A. Ivanov,  

 

期刊: X‐Ray Spectrometry  （WILEY Available online 1980）
卷期: Volume 9, issue 1  

页码: 36-37

 

ISSN:0049-8246

 

年代: 1980

 

DOI:10.1002/xrs.1300090111

 

出版商: Wiley Subscription Services, Inc., A Wiley Company

 

数据来源: WILEY

 

摘要:

AbstractA new system for on‐line X‐ray topography is described, in which relative motions of separate assemblies are completely eliminated. The main elements of the system are a low‐power raster‐type X‐ray source with a transmission target and a multi‐capillary collimator. It takes about 2.5–3 min to produce a topograph of silicon single‐crystal (20 × 20 × 0.3mm) when the radiation source

 

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