Reliability of high dielectric Ba0.5Sr0.5TiO3capacitors using iridium electrode
作者:
SeonYong Cha,
Byung-Tak Jang,
HeeChul Lee,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1999)
卷期:
Volume 24,
issue 1-4
页码: 45-55
ISSN:1058-4587
年代: 1999
DOI:10.1080/10584589908215577
出版商: Taylor & Francis Group
关键词: reliability;BST;iridium;electrode
数据来源: Taylor
摘要:
In order to clarify the decrease of the dielectric constant of Ba0.5Sr0.5TiO3capacitor under the electrical stress, the degradation phenomena including resistant degradation were studied in detail. They were well explained by the increases of the dielectric relaxation and dielectric dispersion which are caused by the generation of oxygen vacancies. This explanation was proved by several additional experiments such as the investigation of Schottky barrier with the stress, the observation of some bubbles and O2plasma annealing. It was also confirmed that the electrical degradation of BST capacitor is effectively suppressed by using iridium (Ir) electrode, especially as a top electrode.
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