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Extended platelets on {111} in GaAs created by He-ion implantation followed by low temperature annealing

 

作者: T. Nomachi,   S. Muto,   M. Hirata,   H. Kohno,   Jun Yamasaki,   S. Takeda,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 71, issue 2  

页码: 255-257

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.119513

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have found that the extremely extended platelets of about 1 &mgr;m in diameter are formed in GaAs by He-ion implantation and subsequent annealing at 250 and 300 °C for the short period of 180–300 s. We have shown that the platelets are extended not on the most easily cleavaged {110}-type planes but on {111}-type planes. The platelets give rise to the extra transmission electron diffraction spots. The analysis of the diffraction, combined with electron microscopy data, has shown that unreconstructed interior {111} surfaces, oppositely bent, are created in GaAs. ©1997 American Institute of Physics.

 

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