Extended platelets on {111} in GaAs created by He-ion implantation followed by low temperature annealing
作者:
T. Nomachi,
S. Muto,
M. Hirata,
H. Kohno,
Jun Yamasaki,
S. Takeda,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 71,
issue 2
页码: 255-257
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.119513
出版商: AIP
数据来源: AIP
摘要:
We have found that the extremely extended platelets of about 1 &mgr;m in diameter are formed in GaAs by He-ion implantation and subsequent annealing at 250 and 300 °C for the short period of 180–300 s. We have shown that the platelets are extended not on the most easily cleavaged {110}-type planes but on {111}-type planes. The platelets give rise to the extra transmission electron diffraction spots. The analysis of the diffraction, combined with electron microscopy data, has shown that unreconstructed interior {111} surfaces, oppositely bent, are created in GaAs. ©1997 American Institute of Physics.
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