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Application of Autoradiography to the Investigation of New Doping Techniques of Semiconductor Materials

 

作者: W. Wroński,   L. Waliś,  

 

期刊: Isotopenpraxis Isotopes in Environmental and Health Studies  （Taylor Available online 1974）
卷期: Volume 10, issue 5  

页码: 170-173

 

ISSN:0021-1915

 

年代: 1974

 

DOI:10.1080/10256017408623288

 

出版商: Taylor & Francis Group

 

关键词: autoradiography;diffusion;doping techniques;gold isotopes,198Au;ion implantation;Phosphorus isotopes,32P;semiconductor materials;silicon

 

数据来源: Taylor

 

摘要:

The development of technology of new semiconductor devices requires fundamental studies of a number of phenomena taking place in semiconductors during the doping process or accompanying the doping process.

 

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