We use scanning micro‐Raman spectroscopy (SMRS) to characterize the epitaxial film quality as well as low‐temperature scanning laser microscopy (LTSLM) to image electrical properties of YBa2Cu3O7devices locally in both lateral dimensions. Investigations have been performed on crossovers as used in flux transformers of magnetometers, patterned in a multilayer process on SrTiO3(100) substrates. We find a correlation between an inhomogeneous superconducting performance and a disturbance of epitaxy on locations where the crossovers pass edges of the underlying bridge. The distribution of the oxygen is not affected at these points. ©1996 American Institute of Physics.