首页   按字顺浏览 期刊浏览 卷期浏览 Vertical amorphous silicon thin‐film transistors
Vertical amorphous silicon thin‐film transistors

 

作者: John G. Shaw,   Mike Hack,  

 

期刊: Journal of Applied Physics  (AIP Available online 1990)
卷期: Volume 67, issue 3  

页码: 1576-1581

 

ISSN:0021-8979

 

年代: 1990

 

DOI:10.1063/1.345669

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A vertical amorphous silicon thin‐film transistor that has a very short channel length that is determined by deposition, not lithography, is described. These transistors have a field‐effect mobility of approximately 0.5 cm2/V s, an effective channel length of 1.5 &mgr;m, and a dynamic range of over five orders of magnitude. A method for suppressing excessive leakage currents and improving the saturation of the output characteristics by a novel current‐blocking technique is shown. A two‐dimensional computer program is used to analyze these devices and guide their design and optimization. Unlike a conventional thin‐film transistor, the current path is primarily parallel to the electric field created by an insulated gate electrode. These vertical transistors are easy to fabricate, compatible with large‐area processing techniques, and have suitable terminal characteristics for use in practical circuits.

 

点击下载:  PDF (626KB)



返 回