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Characteristics of amorphous silicon staggered‐electrode thin‐film transistors

 

作者: M. J. Powell,   J. W. Orton,  

 

期刊: Applied Physics Letters  (AIP Available online 1984)
卷期: Volume 45, issue 2  

页码: 171-173

 

ISSN:0003-6951

 

年代: 1984

 

DOI:10.1063/1.95158

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Amorphous silicon staggered‐electrode thin‐film transistors (TFT’s) can show current crowding near the origin in the output characteristics. The degree of current crowding is governed by the voltage dependence of the current flowing from then+contact to the conducting channel. This current is a space‐charge‐limited current whose magnitude depends on the bulk density of states in the undoped intrinsic layer. For a 0.5‐&mgr;m‐thickilayer, calculations predict negligible current crowding forN(E)<1016cm−3 eV−1, but severe current crowding forN(E)>3×1016cm−3 eV−1. Experimental results are consistent withN(E) in the range 1016cm−3 eV−1–2×1016cm−3 eV−1. This is lower than the value derived from the transfer characteristic of the TFT (∼1017cm−3 eV−1), which is evidence for an inhomogeneous distribution of deep gap states through the 0.5‐&mgr;m film of &agr;‐Si:H.

 

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