首页   按字顺浏览 期刊浏览 卷期浏览 Unpinned Schottky barrier formation at metal–GaAs interfaces
Unpinned Schottky barrier formation at metal–GaAs interfaces

 

作者: L. J. Brillson,   R. E. Viturro,   C. Mailhiot,   J. L. Shaw,   N. Tache,   J. McKinley,   G. Margaritondo,   J. M. Woodall,   P. D. Kirchner,   G. D. Pettit,   S. L. Wright,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  (AIP Available online 1988)
卷期: Volume 6, issue 4  

页码: 1263-1269

 

ISSN:0734-211X

 

年代: 1988

 

DOI:10.1116/1.584247

 

出版商: American Vacuum Society

 

关键词: FERMI LEVEL;SCHOTTKY BARRIER DIODES;ARSENIC;BARRIER HEIGHT;GALLIUM ARSENIDES;GOLD;ALUMINIUM;COPPER;INTERFACE STATES;METAL−SEMICONDUCTOR CONTACTS;FABRICATION;MOLECULAR BEAM EPITAXY;SOFT X RADIATION;PHOTOEMISSION;GaAs

 

数据来源: AIP

 

摘要:

We have used soft x‐ray photoemission spectroscopy measurements to demonstrate that metal–GaAs interfaces can exhibit relatively unpinned Fermi level (Ef) movements. For clean GaAs (100) surfaces obtained by molecular‐beam epitaxy (MBE) growth and thermal decapping of a protective As overlayer, the metals Au, Al, Cu, and In produce a 0.6–0.7‐eV range ofEfstabilization. For a given metal, this stabilization occurs at the same energies forn‐type andp‐type GaAs. Furthermore,Efmovements are metal‐dependent and can evolve over multimonolayer coverages. These results are examined with respect to pronounced differences in semiconductor quality between MBE versus melt‐grown GaAs and in the context of previous GaAsEfmeasurements. A self‐consistent analysis of the junction electrostatics accounts for the functional dependence of barrier height on metal work function. The results highlight the importance of bulk quality as well as interface specific phenomena in controlling the Schottky barrier formation at metal/III–V compound semiconductor interfaces.

 

点击下载:  PDF (851KB)



返 回