Growth of highly oriented carbon nanotubes by plasma-enhanced hot filament chemical vapor deposition
作者:
Z. P. Huang,
J. W. Xu,
Z. F. Ren,
J. H. Wang,
M. P. Siegal,
P. N. Provencio,
期刊:
Applied Physics Letters
(AIP Available online 1998)
卷期:
Volume 73,
issue 26
页码: 3845-3847
ISSN:0003-6951
年代: 1998
DOI:10.1063/1.122912
出版商: AIP
数据来源: AIP
摘要:
Highly oriented, multiwalled carbon nanotubes were grown on polished polycrystalline and single crystal nickel substrates by plasma enhanced hot filament chemical vapor deposition at temperatures below 666&hthinsp;°C. The carbon nanotubes range from 10 to 500 nm in diameter and 0.1 to 50 &mgr;m in length depending on growth conditions. Acetylene is used as the carbon source for the growth of the carbon nanotubes and ammonia is used for dilution gas and catalysis. The plasma intensity, acetylene to ammonia gas ratio, and their flow rates, etc. affect the diameters and uniformity of the carbon nanotubes. ©1998 American Institute of Physics.
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