Triode plasma etching
作者:
V. J. Minkiewicz,
B. N. Chapman,
期刊:
Applied Physics Letters
(AIP Available online 1979)
卷期:
Volume 34,
issue 3
页码: 192-193
ISSN:0003-6951
年代: 1979
DOI:10.1063/1.90746
出版商: AIP
数据来源: AIP
摘要:
Reactive‐plasma etching is conventionally carried out using one power supply to both generate the glow discharge and to control the flux and energy of ion bombardment on the substrate. A three‐electrode, or triode, configuration is described in which these two functions are controlled quasi‐independently; results obtained with this arrangement are described. These results are somewhat similar to those obtained with a diode RIE system, except that control of the substrate voltage allows another degree of freedom over etch rates, etch selectivity, and wall profiles.
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