Texture‐induced asymmetric reactions in TiN/Al–Cu/TiN
作者:
Q. Z. Hong,
S. P. Jeng,
R. H. Havemann,
H. L. Tsai,
H. Y. Liu,
期刊:
Journal of Applied Physics
(AIP Available online 1995)
卷期:
Volume 78,
issue 12
页码: 7419-7421
ISSN:0021-8979
年代: 1995
DOI:10.1063/1.360398
出版商: AIP
数据来源: AIP
摘要:
Thermally induced reactions in TiN/Al–Cu/TiN have been investigated. It is observed that the amount of the reactions is different at the two interfaces between Al–Cu and TiN. While there is minimal reaction between Al–Cu and the TiN overlayer, the reaction between Al–Cu and the TiN underlayer increases the sheet resistance of Al–Cu by as much as 15%. It is further shown that the asymmetric reactions are most likely caused by the different degree of (111) texture of TiN grown on amorphous SiO2and textured, polycrystalline Al–Cu. ©1995 American Institute of Physics.
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