Detection and control of ferroelectric domains by an electrostatic force microscope
作者:
J. W. Hong,
D. S. Kahng,
J. C. Shin,
H. J. Kim,
Z. G. Khim,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1998)
卷期:
Volume 16,
issue 6
页码: 2942-2946
ISSN:1071-1023
年代: 1998
DOI:10.1116/1.590323
出版商: American Vacuum Society
关键词: TGS;PZT
数据来源: AIP
摘要:
An electrostatic force microscopy (EFM) method has been used for the detection and control of the microdomain in ferroelectric single crystal [triglycine sulfate (TGS)] and thin film piezoelectric transducer (PZT). In this method, EFM is operated in adynamic contactmode that allows a simultaneous measurement of the topographic and domain contrast images. Through the analysis of the force between the tip and ferroelectric surface, the surface charge density of TGS single crystal is obtained. Polarization charge density of TGS obtained in this method is 2.7 μC/cm2at room temperature. A complex pattern was written on a PZT film by the polarization reversal. The line shape or the intensity of the reoriented domain does not show any noticeable dependence on the writing speed. The threshold bias for writing on a PZT film studied in this work was 4 V.
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