Dependence of the noise spectrum of acoustically induced cavitation on the vibrational level of a radiation surface was investigated in a range of vibrational displacement from 0.1 to 24 μm; a heterodyne fiber‐optic hydrophone was used to detect cavitation noise. As vibrational level is increased beyond cavitation threshold, the fundamental component and the second and third harmonics cease to increase andn/2‐ andn/4‐order subharmonics (n: integer) start to increase. At a vibrational level wheren/2‐order subharmonics become maximum,n/4‐order subharmonics make a dip in their spectral level. At high vibrational levels, subharmonics ofn/4 order become dominant.