We have developed a process of making a highly conductive carbon nanotube (CNT) probe. The process is as follows. 1) An amorphous carbon layer was deposited on the protruding part of a CNT probe as a mask. 2) A metal layer was deposited on all over the CNT probe. 3) The amorphous carbon layer was removed so that the metal layer was remained only at the contact area of the CNT and a base tip. The resultant CNT probes have been applied to contact mode atomic force microscopy (AFM) for measuring topographic images and current images to prove their ability. © 2003 American Institute of Physics