The angular distributions of sputtered particles from nickel
作者:
I.M. Fayazov,
Sh.N. Garin,
A.V. Sidorov,
A.I. Yunusov,
期刊:
Radiation Effects and Defects in Solids
(Taylor Available online 1992)
卷期:
Volume 124,
issue 2
页码: 197-202
ISSN:1042-0150
年代: 1992
DOI:10.1080/10420159208220191
出版商: Taylor & Francis Group
关键词: sputtering;Ni and Cu;ion bombardment
数据来源: Taylor
摘要:
The angular distributions of sputtered particles for the 30 keV Ar-Ni combination have been experimentally studied using the collector technique. The distributions for the ion incidence angle in interval of 0°–80° relative to a surface normal were measured. The influence of both a direct ejection mechanism and collision cascade mechanism on the shape of these distributions has been discussed. The causes of difference between the shapes of the angular distributions of sputtered particles of nickel and the same distributions of copper are discussed too.
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