Sheet‐shaped plasma produced by electron cyclotron resonance heating
作者:
Kanetoshi Shibata,
Noboru Yugami,
Yasushi Nishida,
期刊:
Review of Scientific Instruments
(AIP Available online 1994)
卷期:
Volume 65,
issue 7
页码: 2310-2315
ISSN:0034-6748
年代: 1994
DOI:10.1063/1.1144681
出版商: AIP
数据来源: AIP
摘要:
A new production technique of sheet‐shaped plasma by means of electron cyclotron resonance heating (ECRH) is proposed. The sheet plasma is produced in a vessel with rectangular cross section set in a rectangular magnetic field coil. The maximum density and electron temperature of the sheet plasma are about 2.6×1011cm−3and 7 eV, respectively, in a typical argon gas pressure ofP0=5×10−4Torr. The sheet plasma has several peaks of the density profile across the plasma width. These modes appear according to the change of working gas pressure. Those parameters including plasma density, density profile, and ion energy are controllable. This plasma is expected to be useful for material processing or plasma‐based high‐energy particle accelerators.
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