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Gallium arsenide field‐effect transistors by ion implantation

 

作者: B. M. Welch,   F. H. Eisen,   J. A. Higgins,  

 

期刊: Journal of Applied Physics  (AIP Available online 1974)
卷期: Volume 45, issue 8  

页码: 3685-3687

 

ISSN:0021-8979

 

年代: 1974

 

DOI:10.1063/1.1663838

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Gallium arsenide Schottky‐barrier field‐effect transistors have been fabricated in ann‐type film produced by sulfur implantation in a Cr‐doped semi‐insulating GaAs substrate. The conditions of the implantation and the resulting electrical properties of the film are presented. The FET devices are described and the measured current‐voltage characteristics of this device are discussed.

 

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