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A simple self‐propelled two‐dimensional micropositioner

 

作者: B. L. Blackford,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1993)
卷期: Volume 64, issue 5  

页码: 1360-1361

 

ISSN:0034-6748

 

年代: 1993

 

DOI:10.1063/1.1144094

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A quartz tube is propelled horizontally along a quartz track by the stick‐slip inertial slider method, activated by the longitudinal mode of a piezoelectric tube mounted inside the quartz tube. Two‐dimensional motion is achieved by rotation of the quartz tube, activated by the bending mode of the piezo. With a sample attached to the quartz tube, the device is an excellent replacement for the electrostatic‐clamp type of walker used as the coarse approach mechanism in scanning probe microscopes (SPMs). Alternatively, by attaching the tip (or sample) to the piezo tube, the device can function as a very simple SPM in which the same piezo tube is used for coarse approach and for scanning. The device performs reliably in air and high vacuum, and is ultrahigh vacuum compatible. Step sizes from 10 to 1000 nm, and speeds up to 0.2 mm/s are possible.  

 

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