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Cleaning of Si(001) surfaces studied by optical second‐harmonic generation and x‐ray photoelectron spectroscopy

 

作者: R. W. J. Hollering,   D. Dijkkamp,   H. W. L. Lindelauf,   P. A. M. van der Heide,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1991)
卷期: Volume 9, issue 4  

页码: 1967-1969

 

ISSN:1071-1023

 

年代: 1991

 

DOI:10.1116/1.585389

 

出版商: American Vacuum Society

 

关键词: SILICON;SURFACE CLEANING;OXIDES;SECOND HARMONIC GENERATION;PHOTOELECTRON SPECTROSCOPY;X RADIATION;SURFACE RECONSTRUCTION;Si

 

数据来源: AIP

 

摘要:

Optical second‐harmonic generation (SHG) data are presented on the cleaning of Si(001) surfaces covered with thin (20–40 Å) oxide layers. The removal of an oxide layer by annealing, results in the formation of a 2×1 reconstructed surface and a concurrent increase in second‐harmonic intensity of nearly two orders of magnitude. A comparable signal increase is observed in the transition from an unreconstructed passivated Si(001) surface, produced by etching, to a clean 2×1 reconstructed surface. It is concluded that SHG is very sensitive to the presence of surface states on the 2×1 reconstructed Si(001) surface.

 

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