Cleaning of Si(001) surfaces studied by optical second‐harmonic generation and x‐ray photoelectron spectroscopy
作者:
R. W. J. Hollering,
D. Dijkkamp,
H. W. L. Lindelauf,
P. A. M. van der Heide,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1991)
卷期:
Volume 9,
issue 4
页码: 1967-1969
ISSN:1071-1023
年代: 1991
DOI:10.1116/1.585389
出版商: American Vacuum Society
关键词: SILICON;SURFACE CLEANING;OXIDES;SECOND HARMONIC GENERATION;PHOTOELECTRON SPECTROSCOPY;X RADIATION;SURFACE RECONSTRUCTION;Si
数据来源: AIP
摘要:
Optical second‐harmonic generation (SHG) data are presented on the cleaning of Si(001) surfaces covered with thin (20–40 Å) oxide layers. The removal of an oxide layer by annealing, results in the formation of a 2×1 reconstructed surface and a concurrent increase in second‐harmonic intensity of nearly two orders of magnitude. A comparable signal increase is observed in the transition from an unreconstructed passivated Si(001) surface, produced by etching, to a clean 2×1 reconstructed surface. It is concluded that SHG is very sensitive to the presence of surface states on the 2×1 reconstructed Si(001) surface.
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