Surface photoprocesses in laser‐assisted etching and film growth
作者:
F. A. Houle,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1989)
卷期:
Volume 7,
issue 5
页码: 1149-1154
ISSN:0734-211X
年代: 1989
DOI:10.1116/1.584565
出版商: American Vacuum Society
关键词: ETCHING;FILM GROWTH;SURFACE PROPERTIES;PHOTOCHEMICAL REACTIONS;ILLUMINATION;ADSORPTION;PHOTODISSOCIATION;DESORPTION;SILICON;XENON FLUORIDES;DISSOCIATION;CHROMIUM COMPOUNDS;MK RANGE;SORPTIVE PROPERTIES;CARBONYLS;Si;Cs;Cu
数据来源: AIP
摘要:
Photochemical etching and deposition systems involve a range of laser‐induced and spontaneous processes occurring on rough, chemically heterogeneous surfaces. As such, they present an interesting opportunity for extending our understanding of surface photophysical and photochemical phenomena. In this article results of recent experiments investigating the effect of illumination on adsorption, dissociation, and desorption in such systems are described. Studies carried out under realistic film deposition and etching conditions are compared to studies of submonolayer assemblies on clean crystalline surfaces.
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