Positron-annihilation-induced Auger electron spectroscopy (PAES) uses a beam of low-energy positrons to excite Auger transitions via annihilation of core electrons. This mechanism imbues PAES with a high degree of surface specificity and the ability to eliminate the large collisionally induced secondary-electron background typically present in conventional Auger spectra. Here, we describe a high-resolution PAES system with an energy resolution&Dgr;E/E=2.5&percent;,approximately five times better than previous PAES spectrometers. The system consists of a compact low-energy(∼10 eV)electrostatically focused positron beam and a large cylindrical mirror analyzer. High-resolution PAES spectra from Cu(100) and Ge(100) surfaces are presented to illustrate the capabilities of the system. Energy spectra of secondary electrons and reemitted positrons resulting from bombardment of the surface by low-energy positron are also presented. ©1997 American Institute of Physics.