Excimer lasers are excellent sources of coherent light in the ultraviolet range of the spectrum. However, they have the drawback of requiring significant maintenance due to the corrosive gases, generation of dust, and contamination of the laser chamber optics which occur during normal operation. Improvements which are generally applicable to any excimer laser system are specifically described in terms of the two Questek (Lambda Physik, Acton, MA) model 2860 lasers in our lab. The same basic procedures are currently being implemented in two Lambda lasers in other research groups at our university. A novel gas triple filtration system, a simple cold trap with a counter‐flow heat exchanger, and a careful selection of valves have been added to minimize dust contamination of the optics, to decrease contamination and leakage of the gas fill, to provide safe and easy dust removal, and to reduce maintenance downtime.