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Reactive sputtering of platinum in Ar–O2mixtures

 

作者: M. Hecq,   A. Hecq,   T. Robert,  

 

期刊: Journal of Vacuum Science and Technology  （AIP Available online 1979）
卷期: Volume 16, issue 3  

页码: 960-961

 

ISSN:0022-5355

 

年代: 1979

 

DOI:10.1116/1.570121

 

出版商: American Vacuum Society

 

关键词: PLATINUM;SPUTTERING;ARGON;OXYGEN;MIXTURES;MASS SPECTROSCOPY;PENNING EFFECT;CHEMICAL REACTION KINETICS;PHOTOELECTRON SPECTROSCOPY;X RADIATION;BINDING ENERGY;FILMS;X=(HYPHEN)=RAY DIFFRACTION

 

数据来源: AIP

 

摘要:

Platinum sputtering in argon–oxygen mixtures is studied utilizing the technique of glow discharge mass spectrometry which involves penning ionization in the plasma and analysis in a quadrupole filter. (AIP)

 

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