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Titanium‐doped semi‐insulating InP grown by the liquid encapsulated Czochralski method

 

作者: G. W. Iseler,   Brian S. Ahern,  

 

期刊: Applied Physics Letters  (AIP Available online 1986)
卷期: Volume 48, issue 24  

页码: 1656-1657

 

ISSN:0003-6951

 

年代: 1986

 

DOI:10.1063/1.96845

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Semi‐insulating crystals of InP with resistivities of 1–3×106&OHgr; cm have been grown by the liquid encapsulated Czochralski method from melts co‐doped with Ti, a deep donor located 0.62±0.02 eV below the conduction band, and either Zn, Cd, or Be. This technique should make it possible to obtain crystals with resistivities of 107–108&OHgr; cm, which would be of interest for integrated circuit applications if their thermal stability were found to exceed that of Fe‐doped semi‐insulating InP.

 

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