Titanium‐doped semi‐insulating InP grown by the liquid encapsulated Czochralski method
作者:
G. W. Iseler,
Brian S. Ahern,
期刊:
Applied Physics Letters
(AIP Available online 1986)
卷期:
Volume 48,
issue 24
页码: 1656-1657
ISSN:0003-6951
年代: 1986
DOI:10.1063/1.96845
出版商: AIP
数据来源: AIP
摘要:
Semi‐insulating crystals of InP with resistivities of 1–3×106&OHgr; cm have been grown by the liquid encapsulated Czochralski method from melts co‐doped with Ti, a deep donor located 0.62±0.02 eV below the conduction band, and either Zn, Cd, or Be. This technique should make it possible to obtain crystals with resistivities of 107–108&OHgr; cm, which would be of interest for integrated circuit applications if their thermal stability were found to exceed that of Fe‐doped semi‐insulating InP.
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