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Simulation study on performance of field emitter array

 

作者: Lei Wei,   Wang Baoping,   Yin Hanchun,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1998)
卷期: Volume 16, issue 5  

页码: 2881-2886

 

ISSN:1071-1023

 

年代: 1998

 

DOI:10.1116/1.590287

 

出版商: American Vacuum Society

 

数据来源: AIP

 

摘要:

An improved finite difference method is used to study the field emitter arrays in both diode and triode modes. In the simulation, the boundary of the emitter can be fitted with irregular meshes. The emission performance of the emitter array is analyzed in this article. Simulation results show that the electric field at tips in the emitter array is not uniform. The emission currents from tips are also different. Due to the influence of the interaction and fringe field, the emission currents from tips near the edge of the array are larger than that from tips on the center part of the array. However, the presence of the gate can reduce the interaction between neighboring tips in the triode structure. Thus, it is possible to achieve a higher current density in the triode mode.

 

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