An automatic dip coating process for dielectric thin and thick films
作者:
KewenK. Li,
GeneH. Haertling,
Wei-Yean Howng,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1993)
卷期:
Volume 3,
issue 1
页码: 81-91
ISSN:1058-4587
年代: 1993
DOI:10.1080/10584589308216702
出版商: Taylor & Francis Group
关键词: dip coating;fluid mechanics;thin films;thick films;PLZT
数据来源: Taylor
摘要:
A computer-controlled dip coating apparatus has been designed and constructed for fabricating dielectric films from precursor solutions. This automated mechanism provided a totally hands-off process by which films of good quality and uniformity were easily and conveniently formed. Fluid mechanics involved in the dip coating process successfully predicted the single-layer film thickness of one dipping and firing cycle, and this thickness was found to be additive to give the final film thickness consisting of multiple such layers. Properties of films of the lanthanum-modified lead zirconate titanate (PLZT) family derived from an acetate precursor system by this process were discussed.
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