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Dielectric breakdown in high-ϵ films for ULSI DRAMs

 

作者: J.F. Scott,   B.M. Melnick,   L.D. McMillan,   C.A. Paz De Araujo,  

 

期刊: Integrated Ferroelectrics  (Taylor Available online 1993)
卷期: Volume 3, issue 3  

页码: 225-243

 

ISSN:1058-4587

 

年代: 1993

 

DOI:10.1080/10584589308216715

 

出版商: Taylor & Francis Group

 

关键词: high dielectric;PZT;lead zirconate-titanate;breakdown

 

数据来源: Taylor

 

摘要:

Dielectric breakdown has been studied in several materials intended for high-dielectric DRAMs (dynamic random access memories), emphasizing lead zirconate-titanate (PZT) and barium strontium titanate (BST) ceramics. In this paper we present our results on PZT. A second paper will deal with BST. In order to distinguish among impulse thermal breakdown, de thermal breakdown, and avalanche breakdown mechanisms, studies have been carried out as functions of temperature, electrode material and shape, frequency and duration of applied fields, and specimen size and shape. Notable in the results is the fact that maximum breakdown field varies directly with electrode work function but is uncorrelated with electrode thermal conductivity; this militates against a purely thermal breakdown interpretation and instead favors an avalanche mechanism in which the iniation step is impact ionization of Ti ions from electrons emitted from the electrodes, followed by thermal run-away. Thickness dependence also favors avalanche mechanisms, but dependence upon applied field ramp rate favors an impulse thermal mechanism. Taken altogether, the data indicate characteristics of mixed impulse-thermal and avalanche mechanisms: i.e., electron-initiation followed by thermal run-away.

 

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