Outgassing characteristics of TiC‐coated graphite
作者:
S. Sukenobu,
Y. Gomay,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1983)
卷期:
Volume 1,
issue 1
页码: 95-96
ISSN:0734-2101
年代: 1983
DOI:10.1116/1.572319
出版商: American Vacuum Society
关键词: graphite;degassing;titanium carbides;chemical vapor deposition;surface coating
数据来源: AIP
摘要:
Outgassing characteristics of POCO graphite coated with TiC by chemical vapor deposition are reported. Results obtained from fully TiC‐coated samples showed that the coating layers are not completely gas tight. The air included in the porous part of the graphite was gradually released at an outgassing rate on the order of 10−10Torr⋅l/s⋅cm2. After exposing a part of the graphite surface, the outgassing rate was reduced to the order of 10−12Torr⋅l/s⋅cm2, after vacuum baking at 250 °C for 24 h.
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