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Resistive thermoconductive humidity sensor with TaN thin film

 

作者: T. Shioyama,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  （AIP Available online 1983）
卷期: Volume 1, issue 1  

页码: 41-43

 

ISSN:0734-2101

 

年代: 1983

 

DOI:10.1116/1.572307

 

出版商: American Vacuum Society

 

关键词: tantalum nitrides;thin films;sputtering;pulse rise time;accuracy;humidity;sensors

 

数据来源: AIP

 

摘要:

TaN thin films prepared by reactive sputtering are applied to a resistive thermoconductive type of humidity sensor. The characteristics of the sensor are as follows: The humidity sensor with TaN thin films can measure up to the absolute humidity of about 70 g/m3in the case of the sensor heated up to 150 °C. In its response, the rise time is 10 s and the fall time is 55 s.

 

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