Resistive thermoconductive humidity sensor with TaN thin film
作者:
T. Shioyama,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1983)
卷期:
Volume 1,
issue 1
页码: 41-43
ISSN:0734-2101
年代: 1983
DOI:10.1116/1.572307
出版商: American Vacuum Society
关键词: tantalum nitrides;thin films;sputtering;pulse rise time;accuracy;humidity;sensors
数据来源: AIP
摘要:
TaN thin films prepared by reactive sputtering are applied to a resistive thermoconductive type of humidity sensor. The characteristics of the sensor are as follows: The humidity sensor with TaN thin films can measure up to the absolute humidity of about 70 g/m3in the case of the sensor heated up to 150 °C. In its response, the rise time is 10 s and the fall time is 55 s.
点击下载:
PDF
(153KB)
返 回