首页   按字顺浏览 期刊浏览 卷期浏览 Developments and trends in the technology of focused ion beams
Developments and trends in the technology of focused ion beams

 

作者: Ross A. D. Mackenzie,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1991)
卷期: Volume 9, issue 5  

页码: 2561-2565

 

ISSN:1071-1023

 

年代: 1991

 

DOI:10.1116/1.585693

 

出版商: American Vacuum Society

 

关键词: ION BEAMS;ION SOURCES;FOCUSING;USES;LIQUID METALS;BEAM PRODUCTION;FIELD EMISSION;BIBLIOGRAPHIES

 

数据来源: AIP

 

摘要:

A bibliography has been compiled covering the production, control, and application of high brightness ion beams extracted from liquid metal and gas field ion sources. The development of this research field is studied, from its inception in the 1970’s in United States and United Kingdom research laboratories to its current status as a routine research tool used in the characterization and modification of a wide range of materials in laboratories worldwide. The increasing importance of Japanese research institutions in the development of new source materials and in the use of these beams in semiconductor materials modification is noted.

 

点击下载:  PDF (546KB)



返 回