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Thin‐film machining by laser‐induced explosion

 

作者: Vicent J. Zaleckas,   Jackson C. Koo,  

 

期刊: Applied Physics Letters  (AIP Available online 1977)
卷期: Volume 31, issue 9  

页码: 615-617

 

ISSN:0003-6951

 

年代: 1977

 

DOI:10.1063/1.89801

 

出版商: AIP

 

数据来源: AIP

 

摘要:

This paper describes a process for the laser machining of thin metallic films on dielectric substrates. The observation of a distinct minimum in the machining threshold and the fact that no substrate damage occurs over a wide range of incident power are explained based on an explosive film‐removal mechanism. Experimental results supporting the predictions are presented.

 

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