Surface investigations by scanning thermal microscopy
作者:
M. Stopka,
L. Hadjiiski,
E. Oesterschulze,
R. Kassing,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1995)
卷期:
Volume 13,
issue 6
页码: 2153-2156
ISSN:1071-1023
年代: 1995
DOI:10.1116/1.588094
出版商: American Vacuum Society
关键词: LASER RADIATION;MICROSCOPY;SPATIAL RESOLUTION;SURFACE PROPERTIES;THERMODYNAMIC PROPERTIES
数据来源: AIP
摘要:
A scanning thermal microscope has been developed which is capable of imaging thermal properties of materials with high spatial resolution. First results indicate a lateral resolution less than 200 nm. The microscope employs a miniaturized thermal probe whose tip is formed as a thermocouple. The probe is laser heated to generate a thermovoltage. A sample approaching the heated tip leads to a heat flow from the tip to the cooler sample surface and thus to a decrease of the measured voltage. In the initial experiments we scanned the tip above the sample surface with open feedback loop and mapped the thermovoltage at each location of the scan range. Furthermore, we closed the feedback loop keeping the thermovoltage constant and measured thezdisplacement of the piezoelectric tube carrying the probe. All these measurements yield topographical as well as thermal information of the sample surface.
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