首页   按字顺浏览 期刊浏览 卷期浏览 Surface investigations by scanning thermal microscopy
Surface investigations by scanning thermal microscopy

 

作者: M. Stopka,   L. Hadjiiski,   E. Oesterschulze,   R. Kassing,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1995)
卷期: Volume 13, issue 6  

页码: 2153-2156

 

ISSN:1071-1023

 

年代: 1995

 

DOI:10.1116/1.588094

 

出版商: American Vacuum Society

 

关键词: LASER RADIATION;MICROSCOPY;SPATIAL RESOLUTION;SURFACE PROPERTIES;THERMODYNAMIC PROPERTIES

 

数据来源: AIP

 

摘要:

A scanning thermal microscope has been developed which is capable of imaging thermal properties of materials with high spatial resolution. First results indicate a lateral resolution less than 200 nm. The microscope employs a miniaturized thermal probe whose tip is formed as a thermocouple. The probe is laser heated to generate a thermovoltage. A sample approaching the heated tip leads to a heat flow from the tip to the cooler sample surface and thus to a decrease of the measured voltage. In the initial experiments we scanned the tip above the sample surface with open feedback loop and mapped the thermovoltage at each location of the scan range. Furthermore, we closed the feedback loop keeping the thermovoltage constant and measured thezdisplacement of the piezoelectric tube carrying the probe. All these measurements yield topographical as well as thermal information of the sample surface.

 

点击下载:  PDF (2294KB)



返 回