Profiling of periodic structures (GaAs&sngbnd;GaAlAs) by nuclear backscattering
作者:
J. W. Mayer,
J. F. Ziegler,
L. L. Chang,
R. Tsu,
L. Esaki,
期刊:
Journal of Applied Physics
(AIP Available online 1973)
卷期:
Volume 44,
issue 5
页码: 2322-2325
ISSN:0021-8979
年代: 1973
DOI:10.1063/1.1662558
出版商: AIP
数据来源: AIP
摘要:
In aiming at an electronic superlattice, epitaxial structures consisting of alternating layers of GaAs and GaAlAs have been grown by molecular‐beam evaporation. The technique of He‐ion backscattering provides a unique method for the direct and non‐destructive profiling of these structures for superlattice layers of a few hundred angstroms if detailed account is made of the backscattering process. The results of Raman spectroscopy and scanning electron microscopy are shown also to furnish complementary information on compositions and thicknesses, respectively. The three techniques give similar results.
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