Evidence of an energetic ion bombardment mechanism for bias‐enhanced nucleation of diamond
作者:
Sean P. McGinnis,
Michael A. Kelly,
Stig B. Hagstro¨m,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 66,
issue 23
页码: 3117-3119
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.113621
出版商: AIP
数据来源: AIP
摘要:
The effect of substrate bias voltage was investigated for bias‐enhanced diamond nucleation pretreatments of diamond thin films in a microwave plasma chemical vapor deposition reactor. A critical bias voltage of approximately −200 V was observed for nucleation density enhancement from ∼104cm−2to ∼1010cm−2. Furthermore, the nucleation density under bias conditions was five orders of magnitude lower for a small silicon region electrically isolated from the otherwise negatively biased silicon substrate. These results confirm that bombardment of the substrate by energetic cations plays a significant role in the diamond nucleation mechanism during bias pretreatments. ©1995 American Institute of Physics.
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