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Quantitative Measurement of Semiconductor Homogeneity from Plasma Edge

 

作者: David F. Edwards,   Paul D. Maker,  

 

期刊: Journal of Applied Physics  (AIP Available online 1962)
卷期: Volume 33, issue 8  

页码: 2466-2468

 

ISSN:0021-8979

 

年代: 1962

 

DOI:10.1063/1.1728995

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The carrier concentration homogeneity in a semiconductor can be quantitatively measured from the position of the plasma edge. This has been demonstrated for an InAs sample for which changes of homogeneity of about 0.5% have been measured. This plasma edge method for measuring carrier concentration inhomogeneities is at least an order of magnitude more sentitive than other methods reported to date and can be applied for any semiconductor that has a well‐defined plasma edge.

 

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