A scanning tunneling microscope controlled field emission microprobe system
作者:
T. H. P. Chang,
D. P. Kern,
M. A. McCord,
L. P. Muray,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1991)
卷期:
Volume 9,
issue 2
页码: 438-443
ISSN:1071-1023
年代: 1991
DOI:10.1116/1.585586
出版商: American Vacuum Society
关键词: ELECTRON MICROPROBE ANALYSIS;FIELD EMISSION;CONTROL EQUIPMENT;SCANNING TUNNELING MICROSCOPY;ELECTRON MICROSCOPY;BEAM OPTICS
数据来源: AIP
摘要:
A novel approach based on scanning tunneling microscopy controlled field emission with microlens to form an exceptionally high brightness electron source and low aberration electron probe forming system has been explored. Electron optical studies of such a microsource have shown it to have a brightness two to three orders of magnitude greater than conventional field emission sources at energies in the low keV range and the ability to form an ultrahigh resolution probe with diameter in the 1 to 10 nm range in conjunction with additional microlenses. Encouraging preliminary experimental results have been obtained.
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