Segregation and trapping of erbium at a moving crystal-amorphous Si interface
作者:
A. Polman,
J. S. Custer,
P. M. Zagwijn,
A. M. Molenbroek,
P. F. A. Alkemade,
期刊:
Journal of Applied Physics
(AIP Available online 1997)
卷期:
Volume 81,
issue 1
页码: 150-153
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.364002
出版商: AIP
数据来源: AIP
摘要:
Segregation and trapping of Er during solid-phase crystallization of amorphous Si on crystalline Si is studied in a concentration range of 1016–5×1020Er/cm3. Amorphous surface layers are prepared on Si(100) by 250 keV Er ion implantation, recrystallized at 600 °C, and then analyzed using high-resolution Rutherford backscattering spectrometry using 2 MeV He+or 100 keV H+. The segregation coefficientkdepends strongly on Er concentration. At Er interface areal densities below 6×1013Er/cm2nearly full segregation to the surface is observed, withk=0.01. At higher Er densities, segregation and trapping in the crystal are observed, withk=0.20. The results are consistent with a model in which it is assumed that defects in thea-Si near the interface act as traps for the Er. ©1997 American Institute of Physics.
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