Application of an x‐ray stepper for subquarter micrometer fabrication
作者:
Yong Chen,
A. M. Haghiri‐Gosnet,
D. Decanini,
M. F. Ravet,
F. Rousseaux,
H. Launois,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1992)
卷期:
Volume 10,
issue 6
页码: 3243-3247
ISSN:1071-1023
年代: 1992
DOI:10.1116/1.585922
出版商: American Vacuum Society
关键词: X RADIATION;MASKING;LITHOGRAPHY;TUNGSTEN;SILICON CARBIDES;SiC;W
数据来源: AIP
摘要:
We report on a study of proximity x‐ray lithography with a commercialized x‐ray stepper (Karl Suss XRS200) and synchrotron orbital radiation at Super‐ACO (Orsay, France). Special attention has been paid to the replication capabilities using SiC/W based high‐resolution x‐ray masks. The results show that proximity printing at a gap of 40 μm can result in subquarter micrometer replication. Since the resolution of the proximity printing is limited by the Fresnel diffraction, we use a double exposure technique to generate higher density and higher resolution grating structures. Fabrication of sub‐100 nm linewidth gratings has been achieved using this technique with a wide exposure latitude.
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