Modulation‐doped FET threshold voltage uniformity of a high throughput 3 inch MBE system
作者:
J. K. Abrokwah,
N. C. Cirillo,
M. J. Helix,
M. Longerbone,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1984)
卷期:
Volume 2,
issue 2
页码: 252-255
ISSN:0734-211X
年代: 1984
DOI:10.1116/1.582797
出版商: American Vacuum Society
关键词: modulation;field effect transistors;fabrication;threshold voltage;heterojunctions;molecular beam epitaxy;gallium arsenides;aluminium arsenides;thickness;mobility;low temperature
数据来源: AIP
摘要:
We report results of the characterization of a high throughput 3 in. MBE system which we have used to fabricate high quality, uniform modulation‐doped field‐effect transistors (MODFET’s). MODFET threshold voltage of 14.6% and hence Nd2product uniformity of 11.3% standard deviation across a 3 in. MBE wafer was achieved. MODFET’s with 77 K mobility over 100 000 cm2/V s were fabricated. Silicon was used as then‐type dopant of the (Al,Ga)As/GaAs heterostructures. Successful calibration of the Si cell temperature resulted in controlled doping in the range 1014cm−3to mid‐1018cm−3in GaAs. AlxGa1−xAs (x≂0.3) was also doped successfully up to 2.5 ×1018cm−3. Doping and thickness uniformity of 2% for both (Al, Ga)As and GaAs over the central 2.5 in. of 3 in. substrates was achieved using substrate rotation.
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