A new design for a multitechnique ultrahigh vacuum surface analysis chamber with high pressure capabilities
作者:
R. A. Campbell,
D. W. Goodman,
期刊:
Review of Scientific Instruments
(AIP Available online 1992)
卷期:
Volume 63,
issue 1
页码: 172-174
ISSN:0034-6748
年代: 1992
DOI:10.1063/1.1142951
出版商: AIP
数据来源: AIP
摘要:
An ultrahigh vacuum (UHV) surface analysis chamber coupled with a high pressure cell (HPC) is described. The UHV chamber has been designed using an octagonal format to utilize several surface analytical techniques. In addition, the single‐level surface analysis chamber design allows simple access to the HPC for carrying out kinetic studies at elevated pressures (≳1 atmosphere) withinsitutransfer from the UHV chamber. The UHV‐compatible HPC has been designed to facilitate the exchange of the sample or repair of the sample holder while maintaining the analysis chamber at UHV conditions.
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