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A new design for a multitechnique ultrahigh vacuum surface analysis chamber with high pressure capabilities

 

作者: R. A. Campbell,   D. W. Goodman,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1992)
卷期: Volume 63, issue 1  

页码: 172-174

 

ISSN:0034-6748

 

年代: 1992

 

DOI:10.1063/1.1142951

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An ultrahigh vacuum (UHV) surface analysis chamber coupled with a high pressure cell (HPC) is described. The UHV chamber has been designed using an octagonal format to utilize several surface analytical techniques. In addition, the single‐level surface analysis chamber design allows simple access to the HPC for carrying out kinetic studies at elevated pressures (≳1 atmosphere) withinsitutransfer from the UHV chamber. The UHV‐compatible HPC has been designed to facilitate the exchange of the sample or repair of the sample holder while maintaining the analysis chamber at UHV conditions.

 

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