A microalignment system for high precision positioning of collimating pinholes
作者:
W. Fischer,
N. Rando,
A. Peacock,
R. Venn,
期刊:
Review of Scientific Instruments
(AIP Available online 1994)
卷期:
Volume 65,
issue 3
页码: 603-607
ISSN:0034-6748
年代: 1994
DOI:10.1063/1.1145124
出版商: AIP
数据来源: AIP
摘要:
A complete micropositioning unit based on high precision, manually controlledX‐Y‐Ztranslators, related metrology system, and sighting microscope is described. It has been specifically developed for the alignment of collimating pinholes (5–10 &mgr;m diam) on cryogenic x‐ray detectors, 10–50 &mgr;m in size, deposited both on transparent and opaque substrates. The main characteristics of this flexible and convenient system are the capability to handle a complete test fixture ready for further measurements at cryogenic temperature, coupled with the possibility to verify the precision attained. Such microalignment equipment will find application in optical/UV/x‐ray photon counting experiments, whenever a highly collimated illumination is required or in any test involving precision positioning of small experimental units onto microdevices or detectors.
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