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A microalignment system for high precision positioning of collimating pinholes

 

作者: W. Fischer,   N. Rando,   A. Peacock,   R. Venn,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1994)
卷期: Volume 65, issue 3  

页码: 603-607

 

ISSN:0034-6748

 

年代: 1994

 

DOI:10.1063/1.1145124

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A complete micropositioning unit based on high precision, manually controlledX‐Y‐Ztranslators, related metrology system, and sighting microscope is described. It has been specifically developed for the alignment of collimating pinholes (5–10 &mgr;m diam) on cryogenic x‐ray detectors, 10–50 &mgr;m in size, deposited both on transparent and opaque substrates. The main characteristics of this flexible and convenient system are the capability to handle a complete test fixture ready for further measurements at cryogenic temperature, coupled with the possibility to verify the precision attained. Such microalignment equipment will find application in optical/UV/x‐ray photon counting experiments, whenever a highly collimated illumination is required or in any test involving precision positioning of small experimental units onto microdevices or detectors.

 

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