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Microphotofabrication of Very Small Objects: Pushing the Limits of Stereophotolithography

 

作者: Michel Cabrera,   Arnaud Bertsch,   Jacques Chassaing,   Jean-Yvon Jezequel,   Jean-Claude Andre,  

 

期刊: Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals  (Taylor Available online 1998)
卷期: Volume 315, issue 1  

页码: 223-234

 

ISSN:1058-725X

 

年代: 1998

 

DOI:10.1080/10587259808044336

 

出版商: Taylor & Francis Group

 

关键词: Stereophotolithography;microfabrication;liquid crystal;resin;metal

 

数据来源: Taylor

 

摘要:

Stereophotolithography (SPL) allows to manufacture 3D polymer parts directly from Computer Aided Design data files. Its principle is the space resolved polymerization of a resin by a laser. We first discuss the possibilities to make parts with a very high resolution. A first approach was to push the classical SPL process to its limits to get a resolution of about 30 micrometres. A second really innovating one was to modulate the light flux by a liquid crystal display and we obtained a resolution of 5 micrometres. Since the use of these parts is limited by the nature of photopolymers, we also developed a new process to make complex polymer/metal parts directly. It consists in making the part layer by layer by using three techniques: SPL, electrodeposit of copper and laser silver plating.

 

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