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Direct bonding of piezoelectric crystal onto silicon

 

作者: Akihiko Namba,   Masato Sugimoto,   Tetsuyoshi Ogura,   Yoshihiro Tomita,   Kazuo Eda,  

 

期刊: Applied Physics Letters  （AIP Available online 1995）
卷期: Volume 67, issue 22  

页码: 3275-3276

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.114896

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A method for bonding a piezoelectric crystal directly onto silicon, without any bonding agents, is reported. The interface microstructure, procedures of fabricating a lithium tantalate (LiTaO3&squflg;‐ on‐silicon resonator, and its resonant characteristics are described. This technique is very promising for miniaturizing electroacoustic integrated devices. ©1995 American Institute of Physics.

 

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