Defect‐free x‐ray masks for 0.2‐μm large‐scale integrated circuits
作者:
I. Okada,
Y. Saitoh,
M. Sekimoto,
T. Ohkubo,
T. Matsuda,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1996)
卷期:
Volume 14,
issue 6
页码: 4328-4331
ISSN:1071-1023
年代: 1996
DOI:10.1116/1.589046
出版商: American Vacuum Society
关键词: masks;Ta;SiN
数据来源: AIP
摘要:
The x‐ray mask fabrication process we developed can be used to make and maintain essentially defect‐free masks consisting of Ta absorbers on SiN membrane. The surface of the deposited SiN substrates is polished to make them as smooth as possible. As Ta is chemically stable, mask fabrication processes are frequently followed with a wet‐cleaning process using a strong acid solution. Inspection of resist patterns printed on a wafer confirms that there are less than 20 printable defects per mask, and there are no defects on the back surface. The inspection and repair are repeated until the mask is defect free. Defects caused by mask handling and x‐ray exposure are immediately washed up by wet cleaning with strong acid. The resulting x‐ray masks have been used in large‐scale integrated circuits fabrication, and fully functional devices have been obtained.
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