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Metal vapor vacuum arc ion source research at Ansto

 

作者: P. J. Evans,   G. C. Watt,   J. T. Noorman,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1994)
卷期: Volume 65, issue 10  

页码: 3082-3087

 

ISSN:0034-6748

 

年代: 1994

 

DOI:10.1063/1.1144757

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Following the pioneering work on metal vapor vacuum arc (MEVVA) ion sources at Lawrence Berkeley Laboratory by Brown and co‐workers, the Australian Nuclear Science and Technology Organization (Ansto) commenced a program of research aimed at constructing a MEVVA based ion implanter. This phase of the program has been completed and the system is now in routine use for surface modification studies. The purpose of the present article is to give an overview of the Ansto implanter with particular reference to those features, such as triggering reliability, which entailed some developmental work. Finally, current ion implantation research activities on this system are briefly described.

 

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