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Characterization of LiNbO3thin films grown on Al2O3by RF sputtering

 

作者: Florence Armani-Leplingard,   JohnJ. Kingston,   DavidK. Fork,  

 

期刊: Integrated Ferroelectrics  （Taylor Available online 1995）
卷期: Volume 6, issue 1-4  

页码: 337-344

 

ISSN:1058-4587

 

年代: 1995

 

DOI:10.1080/10584589508019377

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

We describe our work on LiNbO3thin films grown on Al2O3-c by rf sputtering. X-ray diffraction shows that we grow single phase, epitaxial films in which the lithium content can be varied. Optical measurements and surface morphology characterization show that the optical loss increases with the surface roughness and that the presence of large crystalline outgrowths is a limiting factor for low loss waveguides.

 

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