Angular Distribution of Sputtered Material
作者:
G. K. Wehner,
D. Rosenberg,
期刊:
Journal of Applied Physics
(AIP Available online 1960)
卷期:
Volume 31,
issue 1
页码: 177-179
ISSN:0021-8979
年代: 1960
DOI:10.1063/1.1735395
出版商: AIP
数据来源: AIP
摘要:
The angular distribution of material sputtered under normal Hg+‐ion incidence from flat, polycrystalline targets at 100 to 1000 ev was measured and plotted in polar diagrams. The distribution is ``under cosine,'' approaching a cosine distribution, at higher ion energies. Mo and Fe show a more pronounced tendency to eject to the sides than Ni or Pt. Under oblique ion incidence atoms are sputtered preferentially in the forward direction.
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