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Angular Distribution of Sputtered Material

 

作者: G. K. Wehner,   D. Rosenberg,  

 

期刊: Journal of Applied Physics  (AIP Available online 1960)
卷期: Volume 31, issue 1  

页码: 177-179

 

ISSN:0021-8979

 

年代: 1960

 

DOI:10.1063/1.1735395

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The angular distribution of material sputtered under normal Hg+‐ion incidence from flat, polycrystalline targets at 100 to 1000 ev was measured and plotted in polar diagrams. The distribution is ``under cosine,'' approaching a cosine distribution, at higher ion energies. Mo and Fe show a more pronounced tendency to eject to the sides than Ni or Pt. Under oblique ion incidence atoms are sputtered preferentially in the forward direction.

 

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